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"Petri-net models for comprehensive hazard analysis of MOCVD processes."

Li-Ping Chung, Chuei-Tin Chang (2011)

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DOI: 10.1016/J.COMPCHEMENG.2010.05.006

access: closed

type: Journal Article

metadata version: 2020-05-18

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Li-Ping Chung, Chuei-Tin Chang:
Petri-net models for comprehensive hazard analysis of MOCVD processes. Comput. Chem. Eng. 35(2): 356-371 (2011)

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