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"An effective procedure for sensor variable selection and utilization in ..."
Kye Hyun Baek et al. (2014)
- Kye Hyun Baek, Thomas F. Edgar, Kiwook Song, Gilheyun Choi, Han Ku Cho, Chonghun Han:
An effective procedure for sensor variable selection and utilization in plasma etching for semiconductor manufacturing. Comput. Chem. Eng. 61: 20-29 (2014)
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