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"Identification of a deposition rate profile subspace corresponding to ..."
Raymond A. Adomaitis (2005)
- Raymond A. Adomaitis:
Identification of a deposition rate profile subspace corresponding to spatially-uniform films in planetary CVD reactors: a new criterion for uniformity control. Comput. Chem. Eng. 29(4): 829-837 (2005)
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