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"An adaptive Copula function-based framework for fault detection in ..."

Hongwei Xu et al. (2024)

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DOI: 10.1016/J.CIE.2024.109905

access: closed

type: Journal Article

metadata version: 2024-05-31

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Hongwei Xu, Wei Qin, Yan-Ning Sun, Youlong Lv, Jie Zhang:
An adaptive Copula function-based framework for fault detection in semiconductor wafer fabrication. Comput. Ind. Eng. 188: 109905 (2024)

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