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"A new strategy for defect inspection by the virtual inspection in ..."

Jason Chao-Hsien Pan, Damon H. E. Tai (2011)

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DOI: 10.1016/J.CIE.2010.09.008

access: closed

type: Journal Article

metadata version: 2020-02-20

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Jason Chao-Hsien Pan, Damon H. E. Tai:
A new strategy for defect inspection by the virtual inspection in semiconductor wafer fabrication. Comput. Ind. Eng. 60(1): 16-24 (2011)

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