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"Similarity matching of wafer bin maps for manufacturing intelligence to ..."

Chia-Yu Hsu, Wei-Ju Chen, Ju-Chien Chien (2020)

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DOI: 10.1016/J.CIE.2020.106358

access: closed

type: Journal Article

metadata version: 2020-04-15

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Chia-Yu Hsu, Wei-Ju Chen, Ju-Chien Chien:
Similarity matching of wafer bin maps for manufacturing intelligence to empower Industry 3.5 for semiconductor manufacturing. Comput. Ind. Eng. 142: 106358 (2020)

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