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"A two-phase non-dominated sorting particle swarm optimization for chip ..."

Chia-Yu Hsu, Shih-Chang Chiu (2020)

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DOI: 10.1016/J.CIE.2020.106669

access: closed

type: Journal Article

metadata version: 2020-09-19

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Chia-Yu Hsu, Shih-Chang Chiu:
A two-phase non-dominated sorting particle swarm optimization for chip feature design to improve wafer exposure effectiveness. Comput. Ind. Eng. 147: 106669 (2020)

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