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"Fault classification and timing prediction based on shipment inspection ..."

Euisuk Chung, Kyoungchan Park, Pilsung Kang (2023)

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DOI: 10.1016/J.CIE.2022.108972

access: closed

type: Journal Article

metadata version: 2023-03-21

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Euisuk Chung, Kyoungchan Park, Pilsung Kang:
Fault classification and timing prediction based on shipment inspection data and maintenance reports for semiconductor manufacturing equipment. Comput. Ind. Eng. 176: 108972 (2023)

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