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"Bayesian decision analysis for optimizing in-line metrology and defect ..."
Chen-Fu Chien et al. (2023)
- Chen-Fu Chien
, Tran Hong Van Nguyen
, Yi-Chiu Li, Ying-Jen Chen:
Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study. Comput. Ind. Eng. 182: 109421 (2023)
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