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"Simulation and research on the automatic leveling of a precision stage."

Yongsheng Liu et al. (2013)

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DOI: 10.1016/J.CAD.2012.11.006

access: closed

type: Journal Article

metadata version: 2020-02-13

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Yongsheng Liu, Suping Fang, Hisashi Otsubo, Tsuneto Sumida:
Simulation and research on the automatic leveling of a precision stage. Comput. Aided Des. 45(3): 717-722 (2013)

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