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"Device photolithography: Reduction cameras: Mechanical design of the 3.5x ..."
M. E. Poulsen, J. W. Stafford (1970)
- M. E. Poulsen, J. W. Stafford:
Device photolithography: Reduction cameras: Mechanical design of the 3.5x and 1.4x reduction cameras. Bell Syst. Tech. J. 49(9): 2129-2143 (1970)
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