"Device photolithography: The primary pattern generator part IV-alignment ..."

A. M. Johnson, A. Zacharias (1970)

> Home

Details and statistics

DOI: 10.1002/J.1538-7305.1970.TB02513.X

access: closed

type: Journal Article

metadata version: 2020-03-03

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/bstj/JohnsonZ70
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/bstj/JohnsonZ70
A. M. Johnson, A. Zacharias:
Device photolithography: The primary pattern generator part IV-alignment and performance evaluation. Bell Syst. Tech. J. 49(9): 2069-2075 (1970)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.