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"Device photolithography: Computer systems for pattern generator control."
Arthur G. Gross, J. Raamot, S. B. Watkins (1970)
- Arthur G. Gross, J. Raamot, S. B. Watkins:
Device photolithography: Computer systems for pattern generator control. Bell Syst. Tech. J. 49(9): 2011-2029 (1970)
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