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"Device photolithography: The primary pattern generator part i-optical design."
Morton J. Cowan et al. (1970)
- Morton J. Cowan, D. R. Herriott, A. M. Johnson, A. Zacharias:
Device photolithography: The primary pattern generator part i-optical design. Bell Syst. Tech. J. 49(9): 2033-2041 (1970)
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