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"Device photolithography: A computer controlled coordinate measuring machine."

F. R. Ashley, E. B. Murphy, H. J. Savard (1970)

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DOI: 10.1002/J.1538-7305.1970.TB02521.X

access: closed

type: Journal Article

metadata version: 2020-03-03

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F. R. Ashley, E. B. Murphy, H. J. Savard:
Device photolithography: A computer controlled coordinate measuring machine. Bell Syst. Tech. J. 49(9): 2193-2202 (1970)

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