"Optimization of a thin film deposition process using a dynamic model ..."

Cihan Oguz, Martha A. Gallivan (2008)

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DOI: 10.1016/J.AUTOMATICA.2007.11.017

access: closed

type: Journal Article

metadata version: 2020-02-20

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Cihan Oguz, Martha A. Gallivan:
Optimization of a thin film deposition process using a dynamic model extracted from molecular simulations. Autom. 44(8): 1958-1969 (2008)

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