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"Automatic control in microelectronics manufacturing: Practices, ..."
Thomas F. Edgar et al. (2000)
- Thomas F. Edgar, Stephanie W. Butler, W. Jarrett Campbell, Carlos Pfeiffer, Christopher A. Bode, Sung Bo Hwang, K. S. Balakrishnan, Juergen Hahn
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Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. Autom. 36(11): 1567-1603 (2000)
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