"Control of a planar fine positioner actuated by metal bellows."

Fernand Badano, Maurice Bétemps, Daniel Thomasset (1994)

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DOI: 10.1016/0005-1098(94)90071-X

access: closed

type: Journal Article

metadata version: 2020-02-20

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Fernand Badano, Maurice Bétemps, Daniel Thomasset:
Control of a planar fine positioner actuated by metal bellows. Autom. 30(11): 1677-1691 (1994)

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