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"An inverse-distance weighting genetic algorithm for optimizing the wafer ..."

Hung-Kai Wang, Chen Fu Chien (2020)

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DOI: 10.1016/J.ASOC.2020.106430

access: closed

type: Journal Article

metadata version: 2020-09-19

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Hung-Kai Wang, Chen Fu Chien:
An inverse-distance weighting genetic algorithm for optimizing the wafer exposure pattern for enhancing OWE for smart manufacturing. Appl. Soft Comput. 94: 106430 (2020)

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