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"Adaptive parametric yield enhancement via collinear multivariate analytics ..."

Chen-Fu Chien, Chia-Cheng Chen (2021)

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DOI: 10.1016/J.ASOC.2021.107385

access: closed

type: Journal Article

metadata version: 2022-10-04

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Chen-Fu Chien, Chia-Cheng Chen:
Adaptive parametric yield enhancement via collinear multivariate analytics for semiconductor intelligent manufacturing. Appl. Soft Comput. 108: 107385 (2021)

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