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"Damping-enabling technologies for broadband control of piezo-stages: A survey."

Zhong Chen et al. (2021)

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DOI: 10.1016/J.ARCONTROL.2021.10.007

access: closed

type: Journal Article

metadata version: 2021-12-25

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Zhong Chen, Xineng Zhong, Junjie Shi, Xianmin Zhang:
Damping-enabling technologies for broadband control of piezo-stages: A survey. Annu. Rev. Control. 52: 120-134 (2021)

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