"Crack Defect Detection Processing Algorithm and Method of MEMS Devices ..."

Yu Zheng et al. (2023)

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DOI: 10.1109/ACCESS.2023.3331152

access: open

type: Journal Article

metadata version: 2023-11-28

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Yu Zheng, Susu Li, Yuan Xiang, Zhenxing Zhu:
Crack Defect Detection Processing Algorithm and Method of MEMS Devices Based on Image Processing Technology. IEEE Access 11: 126323-126334 (2023)

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