"Punch-Through-Stopper Free Nanosheet FETs With Crescent Inner-Spacer and ..."

Jun-Sik Yoon et al. (2019)

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DOI: 10.1109/ACCESS.2019.2904944

access: open

type: Journal Article

metadata version: 2025-01-19

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Jun-Sik Yoon, Jinsu Jeong, Seunghwan Lee, Rock-Hyun Baek:
Punch-Through-Stopper Free Nanosheet FETs With Crescent Inner-Spacer and Isolated Source/Drain. IEEE Access 7: 38593-38596 (2019)

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