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"Manufacturing Issues of BEOL CMOS-MEMS Devices."

Juan Valle et al. (2021)

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DOI: 10.1109/ACCESS.2021.3086867

access: open

type: Journal Article

metadata version: 2021-07-13

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Juan Valle, Daniel Fernández, Olivier Gibrat, Jordi Madrenas:
Manufacturing Issues of BEOL CMOS-MEMS Devices. IEEE Access 9: 83149-83162 (2021)

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