"Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning ..."

Tze Chiang Tin, Saw Chin Tan, Ching Kwang Lee (2022)

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DOI: 10.1109/ACCESS.2022.3193783

access: open

type: Journal Article

metadata version: 2022-09-26

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Tze Chiang Tin, Saw Chin Tan, Ching Kwang Lee:
Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning Neural Networks. IEEE Access 10: 81960-81973 (2022)

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