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"Noncontact Thickness Measurement of Cu Film on Silicon Wafer Using ..."
Zilian Qu et al. (2019)
- Zilian Qu, Wensong Wang
, Shuhui Yang, Quqin Sun, Zhongyuan Fang
, Yuanjin Zheng:
Noncontact Thickness Measurement of Cu Film on Silicon Wafer Using Magnetic Resonance Coupling for Stress Free Polishing Application. IEEE Access 7: 75330-75341 (2019)
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