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"Review on Multi-Degree-of-Freedom Piezoelectric Motion Stage."

Yingxiang Liu, Jie Deng, Qi Su (2018)

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DOI: 10.1109/ACCESS.2018.2875940

access: open

type: Journal Article

metadata version: 2023-06-28

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Yingxiang Liu, Jie Deng, Qi Su:
Review on Multi-Degree-of-Freedom Piezoelectric Motion Stage. IEEE Access 6: 59986-60004 (2018)

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