"Research on Wafer CMP Temperature Online Detection Compensation Algorithm ..."

Binjie Li et al. (2025)

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DOI: 10.1109/ACCESS.2025.3566650

access: open

type: Journal Article

metadata version: 2025-06-11

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Binjie Li, Kuan Shen, Zhilong Song, Binghai Lyu, Wenhong Zhao:
Research on Wafer CMP Temperature Online Detection Compensation Algorithm Based on GA-BP Improved Neural Network. IEEE Access 13: 86498-86508 (2025)

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