"Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to ..."

Jong-Sung Lee et al. (2022)

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DOI: 10.1109/ACCESS.2022.3207284

access: open

type: Journal Article

metadata version: 2022-10-18

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Jong-Sung Lee, Suncheul Kim, Donghoon Han, Myoung-Gyu Lee, Young-Chang Joo:
Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape. IEEE Access 10: 100675-100681 (2022)

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