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"Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to ..."
Jong-Sung Lee et al. (2022)
- Jong-Sung Lee, Suncheul Kim, Donghoon Han, Myoung-Gyu Lee, Young-Chang Joo
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Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape. IEEE Access 10: 100675-100681 (2022)
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