"Semiconductor Wafer Defect Recognition Based on Improved Coordinate ..."

Hao He et al. (2025)

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DOI: 10.1109/ACCESS.2025.3546781

access: open

type: Journal Article

metadata version: 2025-05-01

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Hao He, Yuanjie Wei, Xionghao Lin, Minmin Zhu, Haizhong Zhang:
Semiconductor Wafer Defect Recognition Based on Improved Coordinate Attention Mechanism. IEEE Access 13: 46856-46864 (2025)

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