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"MIMO Hμ Feedback Controller With Feedforward Compensator ..."

Irfan Ahmad, Amro Emad Awad Ali, Yasser Bin Salamah (2021)

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DOI: 10.1109/ACCESS.2021.3127575

access: open

type: Journal Article

metadata version: 2021-12-15

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Irfan Ahmad, Amro Emad Awad Ali, Yasser Bin Salamah:
MIMO H_μ Feedback Controller With Feedforward Compensator for Scanning Tunneling Microscope Having 3D Cross-Coupled Piezoelectric Actuator. IEEE Access 9: 153750-153766 (2021)

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