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"Automatic measurement system for degradation analysis in thin-film AlCu ..."

Marcantonio Catelani, R. Nicoletti (2002)

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DOI: 10.1109/TIM.2002.1017707

access: closed

type: Journal Article

metadata version: 2020-12-29

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Marcantonio Catelani, R. Nicoletti:
Automatic measurement system for degradation analysis in thin-film AlCu metallizations. IEEE Trans. Instrum. Meas. 51(3): 401-407 (2002)

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