"Modeling and Experimental Study on Characterization of Micromachined ..."

Rong Zhu et al. (2010)

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DOI: 10.3390/S100908304

access: open

type: Journal Article

metadata version: 2018-11-14

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Rong Zhu, Henggao Ding, Yan Su, Yongjun Yang:
Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors. Sensors 10(9): 8304-8315 (2010)

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