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"Microlithography: Trends, Challenges, Solutions, and Their Impact on Design."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Alfred K. Wong (2003)

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DOI: 10.1109/MM.2003.1196111

access: closed

type: Journal Article

metadata version: 2017-05-20

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Alfred K. Wong:
Microlithography: Trends, Challenges, Solutions, and Their Impact on Design. IEEE Micro 23(2): 12-21 (2003)

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last updated on 2017-05-20 00:26 CEST by the dblp team

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