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"SVM based layout retargeting for fast and regularized inverse lithography."

Kai-sheng Luo et al. (2014)

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DOI: 10.1631/JZUS.C1300357

access: closed

type: Journal Article

metadata version: 2023-07-28

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Kai-sheng Luo, Zheng Shi, Xiaolang Yan, Zhen Geng:
SVM based layout retargeting for fast and regularized inverse lithography. J. Zhejiang Univ. Sci. C 15(5): 390-400 (2014)

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