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"A genetic algorithm approach to manage ion implantation processes in wafer ..."

Shwu-Min Horng, John W. Fowler, Jeffery K. Cochran (2000)

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DOI: 10.1504/IJMTM.2000.001339

access: closed

type: Journal Article

metadata version: 2023-06-26

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Shwu-Min Horng, John W. Fowler, Jeffery K. Cochran:
A genetic algorithm approach to manage ion implantation processes in wafer fabrication. Int. J. Manuf. Technol. Manag. 1(2/3): 156-172 (2000)

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