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"Self-aligned offset gate poly-Si TFTs using photoresist trimming technology."

Longyan Wang et al. (2015)

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DOI: 10.1007/S11432-014-5230-5

access: closed

type: Journal Article

metadata version: 2023-06-26

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  - https://dblp.org/rec/journals/chinaf/WangSHWCZ15
Longyan Wang, Lei Sun, Dedong Han, Yi Wang, Mansun Chan, Shengdong Zhang:
Self-aligned offset gate poly-Si TFTs using photoresist trimming technology. Sci. China Inf. Sci. 58(4): 1-6 (2015)

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