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"A Method for Wafer Defect Detection Using Spatial Feature Points Guided ..."

Jing Yang et al. (2020)

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DOI: 10.1109/ACCESS.2020.2990535

access: open

type: Journal Article

metadata version: 2021-10-25

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  dblp key:
  - journals/access/YangXRDZ20
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  persistent URL:
  - https://dblp.org/rec/journals/access/YangXRDZ20
Jing Yang, Yi Xu, Hai-Jun Rong, Shaoyi Du, Hongmei Zhang:
A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm. IEEE Access 8: 79056-79068 (2020)

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