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"A high-fidelity, web-based simulator for 300 mm wafer fabs."
Hansoo Kim et al. (2001)
- Hansoo Kim, Jonghun Park, SugJe Sohn, Ying Wang, Spyros A. Reveliotis, Chen Zhou, Douglas A. Bodner, Leon F. McGinnis:
A high-fidelity, web-based simulator for 300 mm wafer fabs. SMC 2001: 1288-1293
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