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"Deep learning for virtual metrology: Modeling with optical emission ..."

Matteo Terzi et al. (2017)

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DOI: 10.1109/RTSI.2017.8065905

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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  dblp key:
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Matteo Terzi, Chiara Masiero, Alessandro Beghi, Marco Maggipinto, Gian Antonio Susto:
Deep learning for virtual metrology: Modeling with optical emission spectroscopy data. RTSI 2017: 1-6

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