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"Design and simulation of an active electrostatic bearing for MEMS micromotors."
Fengtian Han, Zhenbin Fu, Jingxin Dong (2009)
- Fengtian Han, Zhenbin Fu, Jingxin Dong:
Design and simulation of an active electrostatic bearing for MEMS micromotors. NEMS 2009: 80-85
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