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"An Automated and Fast OPC Algorithm for OPC-Aware Layout Design."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Ye Chen, Zheng Shi, Xiaolang Yan (2007)

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DOI: 10.1109/ISQED.2007.32

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-28

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Ye Chen, Zheng Shi, Xiaolang Yan:
An Automated and Fast OPC Algorithm for OPC-Aware Layout Design. ISQED 2007: 782-787

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last updated on 2023-07-28 15:16 CEST by the dblp team

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