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"Modeling and Control of Macro-micro Dual-Drive High Acceleration and High ..."
Yanjie Liu, Teng Li, Lining Sun (2008)
- Yanjie Liu, Teng Li, Lining Sun:
Modeling and Control of Macro-micro Dual-Drive High Acceleration and High Precision Positioning Stage Using for IC Packaging. ICIRA (2) 2008: 269-278
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