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"Study for the micromachining optimization of micro hotplates used in ..."

Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca (2011)

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DOI: 10.1109/ICEEE.2011.6106689

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca:
Study for the micromachining optimization of micro hotplates used in MEMS-CMOS gas sensors. CCE 2011: 1-6

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