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"Region-Based Pattern Generation Scheme for DMD Based Maskless Lithography."

Manseung Seo, Jaesung Song, Changgeun An (2005)

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DOI: 10.1007/11767978_10

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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  dblp key:
  - conf/grec/SeoSA05
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Manseung Seo, Jaesung Song, Changgeun An:
Region-Based Pattern Generation Scheme for DMD Based Maskless Lithography. GREC 2005: 108-119

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