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"Fast focus-based depth detection for manipulation in scanning electron ..."

Daniel Jasper, Sergej Fatikow (2011)

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DOI: 10.1109/CASE.2011.6042434

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Daniel Jasper, Sergej Fatikow:
Fast focus-based depth detection for manipulation in scanning electron microscopes. CASE 2011: 375-380

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