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"Modeling methodology: new approaches for simulation of wafer fabrication: ..."
Chanettre Rasmidatta et al. (2002)
- Chanettre Rasmidatta, Shari Murray, John W. Fowler, Gerald T. Mackulak:
Modeling methodology: new approaches for simulation of wafer fabrication: the use of control variates and calibration metrics. WSC 2002: 1414-1422
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