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"A framework for standard modular simulation in semiconductor wafer ..."

José A. Ramírez-Hernández et al. (2005)

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DOI: 10.1109/WSC.2005.1574502

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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  dblp key:
  - conf/wsc/Ramirez-HernandezLFML05
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José A. Ramírez-Hernández, Heshan Li, Emmanuel Fernandez, Charles R. McLean, Swee Leong:
A framework for standard modular simulation in semiconductor wafer fabrication systems. WSC 2005: 2162-2171

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