"Modeling Multivariate Relations in Multiblock Semiconductor Manufacturing ..."

Geert H. van Kollenburg et al. (2023)

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DOI: 10.1109/WSC60868.2023.10408180

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-07

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Geert H. van Kollenburg, Richard Verhoeven, Mike Holenderski, Nirvana Meratnia, Daniele Pagano:
Modeling Multivariate Relations in Multiblock Semiconductor Manufacturing Data Using Process PLS To Enhance Process Understanding. WSC 2023: 2333-2344

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