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"Operational Modeling and Simulation in Semiconductor Manufacturing."
John W. Fowler et al. (1998)
- John W. Fowler, Michael C. Fu, Lee Schruben, Steven Brown, Frank Chance, Sean Cunningham, Courtland Hilton, Mani Janakiram, Richard Stafford, James Hutchby:
Operational Modeling and Simulation in Semiconductor Manufacturing. WSC 1998: 1035
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